Precision machine design for the semiconductor equipment manufacturing industry
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.
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| Formato: | Thesis |
| Idioma: | eng |
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Massachusetts Institute of Technology
2005
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| Acceso en liña: | http://hdl.handle.net/1721.1/11496 |
| _version_ | 1826210933832155136 |
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| author | Van Doren, Matthew J., 1967- |
| author2 | Alexander Slocum. |
| author_facet | Alexander Slocum. Van Doren, Matthew J., 1967- |
| author_sort | Van Doren, Matthew J., 1967- |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. |
| first_indexed | 2024-09-23T14:57:46Z |
| format | Thesis |
| id | mit-1721.1/11496 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T14:57:46Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/114962019-04-12T11:36:04Z Precision machine design for the semiconductor equipment manufacturing industry Van Doren, Matthew J., 1967- Alexander Slocum. Massachusetts Institute of Technology. Dept. of Mechanical Engineering Mechanical Engineering Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. Vita. Includes bibliographical references (p. 293-301). by Matthew James Van Doren. Ph.D. 2005-08-17T19:01:25Z 2005-08-17T19:01:25Z 1995 1995 Thesis http://hdl.handle.net/1721.1/11496 33434802 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 303 p. 19644134 bytes 19643890 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering Van Doren, Matthew J., 1967- Precision machine design for the semiconductor equipment manufacturing industry |
| title | Precision machine design for the semiconductor equipment manufacturing industry |
| title_full | Precision machine design for the semiconductor equipment manufacturing industry |
| title_fullStr | Precision machine design for the semiconductor equipment manufacturing industry |
| title_full_unstemmed | Precision machine design for the semiconductor equipment manufacturing industry |
| title_short | Precision machine design for the semiconductor equipment manufacturing industry |
| title_sort | precision machine design for the semiconductor equipment manufacturing industry |
| topic | Mechanical Engineering |
| url | http://hdl.handle.net/1721.1/11496 |
| work_keys_str_mv | AT vandorenmatthewj1967 precisionmachinedesignforthesemiconductorequipmentmanufacturingindustry |