Precision machine design for the semiconductor equipment manufacturing industry

Precision machine design for the semiconductor equipment manufacturing industry

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.

Bibliographic Details
Main Author: Van Doren, Matthew J., 1967-
Other Authors: Alexander Slocum.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/11496

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