Deposition and characterization of silicon-germanium alloy thin films on oxide
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/11511 |
| _version_ | 1826199078919208960 |
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| author | Tsai, Julie Ann |
| author2 | Rafael Reif. |
| author_facet | Rafael Reif. Tsai, Julie Ann |
| author_sort | Tsai, Julie Ann |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. |
| first_indexed | 2024-09-23T11:14:24Z |
| format | Thesis |
| id | mit-1721.1/11511 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T11:14:24Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/115112019-04-10T07:56:55Z Deposition and characterization of silicon-germanium alloy thin films on oxide Tsai, Julie Ann Rafael Reif. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering Materials Science and Engineering Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. Includes bibliographical references (p. 177-187). by Julie Ann Tsai. Ph.D. 2005-08-17T19:08:27Z 2005-08-17T19:08:27Z 1995 1995 Thesis http://hdl.handle.net/1721.1/11511 33669043 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 187 p. 15866075 bytes 15865830 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Materials Science and Engineering Tsai, Julie Ann Deposition and characterization of silicon-germanium alloy thin films on oxide |
| title | Deposition and characterization of silicon-germanium alloy thin films on oxide |
| title_full | Deposition and characterization of silicon-germanium alloy thin films on oxide |
| title_fullStr | Deposition and characterization of silicon-germanium alloy thin films on oxide |
| title_full_unstemmed | Deposition and characterization of silicon-germanium alloy thin films on oxide |
| title_short | Deposition and characterization of silicon-germanium alloy thin films on oxide |
| title_sort | deposition and characterization of silicon germanium alloy thin films on oxide |
| topic | Materials Science and Engineering |
| url | http://hdl.handle.net/1721.1/11511 |
| work_keys_str_mv | AT tsaijulieann depositionandcharacterizationofsilicongermaniumalloythinfilmsonoxide |