Deposition and characterization of silicon-germanium alloy thin films on oxide

Deposition and characterization of silicon-germanium alloy thin films on oxide

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.

Bibliographic Details
Main Author:	Tsai, Julie Ann
Other Authors:	Rafael Reif.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/11511

Similar Items

Single crystal growth and characterization of silicon germanium alloys
by: Rittenhouse, Tilghman L. (Tilghman Lee), 1972-
Published: (2014)

Fabricating silicon germanium waveguides by low pressure chemical vapor deposition
by: Berlin, Dean Edward, 1978-
Published: (2005)

Experimental Investigation of Size Effects on the Thermal Conductivity of Silicon-Germanium Alloy Thin Films
by: Cheaito, Ramez, et al.
Published: (2012)

Oblique Angle Deposition of Germanium Film on Silicon Substrate
by: Chew, Han Guan, et al.
Published: (2004)

Fabrication and characterization of germanium-on-silicon photodiodes
by: DiLello, Nicole Ann
Published: (2012)

Characterization of chemical vapor deposited polycrystalline silicon thin films
by: Hajjar, Jean-Jacques Joseph
Published: (2005)

Germanium-rich silicon-germanium materials for field-effect modular application
by: Jongthammanurak, Samerkhae
Published: (2009)

Ion beam assisted deposition of biaxially aligned oxide thin films
by: Ressler, Kevin Glenn
Published: (2005)

Growth and characterization of germanium epitaxial film on silicon (001) using reduced pressure chemical vapor deposition
by: Tan, Yew Heng, et al.
Published: (2013)

A comparative study of stress, resistivity and microstructure in copper and copper-alloy thin films
by: Gupta, Julie
Published: (2005)

Integrated thin film batteries on silicon
by: Ariel, Nava
Published: (2006)

Composition Dependence Structural and Optical Properties of Silicon Germanium (SiχGe1−χ) Thin Films
by: Syafiqa Nasir, et al.
Published: (2023)

Single-crystal germanium growth on amorphous silicon
by: McComber, Kevin A
Published: (2012)

Deposition and planarization of epitaxial oxide thin films for high temperature superconducting device applications
by: Chang, Bertha Pi-Ju
Published: (2007)

Electrical breakdown and luminescence from erbium oxide and Er-doped silicon thin films
by: Chen, Kevin M. (Kevin Ming), 1974-
Published: (2005)

Growth and characterization of high quality relaxed graded silicon germanium layers for integrated photodetectors
by: Samavedam, Srikanth B. (Srikanth Balaji), 1970-
Published: (2005)

Growth, characterization and thermal stability of undoped and in-situ doped silicon-germanium heteroepitaxial layers
by: Jang, Syun-Ming
Published: (2005)

Metrology of very thin silicon epitaxial films
by: Chen, Weize, 1966-
Published: (2005)

Understanding defects in germanium and silicon for optoelectronic energy conversion
by: Patel, Neil Sunil
Published: (2016)

Germanium on silicon heteroepitaxy for high efficiency photovoltaic devices
by: Albert, Brian Ross
Published: (2016)

Germanium-on-silicon virtual substrate for lateral multijunction photovoltaics
by: Zhao, Xueying,Ph.D.Massachusetts Institute of Technology.
Published: (2021)

Growth and characterization of germanium expitaxial film on silicon (001) using reduced pressure chemical vapor deposition (RP-CVD)
by: Tan, Yew Heng.
Published: (2013)

Characterization of amorphous silicon carbide thin films for display applications
by: Ahn, Jaeshin, et al.
Published: (2008)

Noble metal alloy thin films by atomic layer deposition and rapid Joule heating
by: Guo, Yuanyuan, et al.
Published: (2022)

Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer
by: Jasni, Farah Anis
Published: (2009)

Electronic structure studies of germanium, tin and their alloy
by: Lim, Dali.
Published: (2009)

Materials science and design for germanium monolithic light source on silicon
by: Cai, Yan, Ph. D. Massachusetts Institute of Technology
Published: (2015)

Low temperature polycrystalline silicon thin films and thin film transistors
by: Li, Junfeng
Published: (2008)

Defects of thin films on silicon wafer
by: Tang, Shiau Khee.
Published: (2008)

Growth and characterization of germanium epitaxial film on silicon (001) with germane precursor in metal organic chemical vapour deposition (MOCVD) chamber
by: Fitzgerald, Eugene A., et al.
Published: (2014)

Perovskite ferroelectric thin films with complex oxide compositions prepared by chemical solution deposition
by: Goh, Phoi Chin
Published: (2014)

Processing and characterization of NiTi-based shape memory alloy thin films
by: Tong, Yunxiang
Published: (2008)

Improved thin film quality and photoluminescence of N-doped epitaxial germanium-on-silicon using MOCVD
by: Zhou, Guangnan, et al.
Published: (2020)

Strain-balanced silicon-germanium materials for near IR photodetection in silicon-based optical interconnects
by: Giovane, Laura Marie
Published: (2005)

Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate
by: Kasim, Nabihah
Published: (2022)

Sputter deposition of aluminum nitride for applications in thin-film resonators
by: Naik, Rajan Sharad
Published: (2005)

Initiated chemical vapor deposition of functional polyacrylic thin films
by: Mao, Yu, 1975-
Published: (2006)

Thermodynamic and kinetic stability of coherent germanium nanocrystallites in a silicon host
by: Balasubramanian, Shuba
Published: (2008)

Atomic layer deposition of noble metal thin films
by: Thong, Claudia Xinyi
Published: (2022)

Fabrication and characterization of silicon-germanium schottky diode
by: Chakravarthi Nanda Kumar
Published: (2010)