Simulation of X-ray phase imaging on integrated circuits
Thesis: S.B., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2017.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2018
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| Online Access: | http://hdl.handle.net/1721.1/115456 |
| _version_ | 1826212004031889408 |
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| author | Arthur, Kwabena (Kwabena K.) |
| author2 | George Barbastathis. |
| author_facet | George Barbastathis. Arthur, Kwabena (Kwabena K.) |
| author_sort | Arthur, Kwabena (Kwabena K.) |
| collection | MIT |
| description | Thesis: S.B., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2017. |
| first_indexed | 2024-09-23T15:14:30Z |
| format | Thesis |
| id | mit-1721.1/115456 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T15:14:30Z |
| publishDate | 2018 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/1154562019-04-10T17:28:54Z Simulation of X-ray phase imaging on integrated circuits Arthur, Kwabena (Kwabena K.) George Barbastathis. Massachusetts Institute of Technology. Department of Mechanical Engineering. Massachusetts Institute of Technology. Department of Mechanical Engineering. Mechanical Engineering. Thesis: S.B., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2017. DISCLAIMER NOTICE: The pagination in this thesis reflects how it was delivered to the Institute Archives and Special Collections. Massachusetts Institute of Technology. The images contained in this document are of the best quality available. Cataloged from PDF version of thesis. Includes bibliographical references (page 12). A study on the simulation of the X-Ray phase imaging on multi-layered integrated circuits (IC) is presented. Model IC's were created with random nanoscale features. First order Rytov approximation was then used in order to accurately and rapidly create diffraction images. This study lays the foundation for future use as a forward model in limited-angle tomography or other inverse problems approaches (e.g neural networks) to reconstruct IC layout from x-ray diffraction images. In particular, it is hoped that the simulation presented here can be used to train neural networks that will carry out the inverse problem in experimental situations. The results of the study show that the first Rytov method is promising for use in this application of IC reconstruction. by Kwabena Arthur. S.B. 2018-05-17T19:07:13Z 2018-05-17T19:07:13Z 2017 2017 Thesis http://hdl.handle.net/1721.1/115456 1035390437 eng MIT theses are protected by copyright. They may be viewed, downloaded, or printed from this source but further reproduction or distribution in any format is prohibited without written permission. http://dspace.mit.edu/handle/1721.1/7582 12 pages application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering. Arthur, Kwabena (Kwabena K.) Simulation of X-ray phase imaging on integrated circuits |
| title | Simulation of X-ray phase imaging on integrated circuits |
| title_full | Simulation of X-ray phase imaging on integrated circuits |
| title_fullStr | Simulation of X-ray phase imaging on integrated circuits |
| title_full_unstemmed | Simulation of X-ray phase imaging on integrated circuits |
| title_short | Simulation of X-ray phase imaging on integrated circuits |
| title_sort | simulation of x ray phase imaging on integrated circuits |
| topic | Mechanical Engineering. |
| url | http://hdl.handle.net/1721.1/115456 |
| work_keys_str_mv | AT arthurkwabenakwabenak simulationofxrayphaseimagingonintegratedcircuits |