The role of surface and bulk perfection in the processing and performance of crystalline silicon

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994.

Detalhes bibliográficos
Autor principal: M'saad, Hichem
Outros Autores: L.C. Kimerling.
Formato: Tese
Idioma:eng
Publicado em: Massachusetts Institute of Technology 2005
Assuntos:
Acesso em linha:http://hdl.handle.net/1721.1/11649

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