Pattern dependencies in the plasma etching of polysilicon

Pattern dependencies in the plasma etching of polysilicon

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1994.

Bibliographic Details
Main Author: Dalton, Timothy Joseph
Other Authors: Herbert H. Sawin.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Chemical Engineering
Online Access:http://hdl.handle.net/1721.1/11655
Description
Summary:Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1994.

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