Fabrication of waveguide spatial light modulators via femtosecond laser micromachining

We have previously introduced an anisotropic leaky-mode modulator as a waveguide-based, acousto-optic solution for spatial light modulation in holographic video display systems. Waveguide fabrication for these and similar surface acoustic wave devices relies on proton exchange of a lithium niobate s...

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Main Authors: Savidis, Nickolaos, Jolly, Sunny, Datta, Bianca, Karydis, Thrasyvoulos, Bove, V. Michael, Jr.
Other Authors: Program in Media Arts and Sciences (Massachusetts Institute of Technology)
Format: Article
Published: SPIE, the International Society of Optical Engineering 2018
Online Access:http://hdl.handle.net/1721.1/116588
https://orcid.org/0000-0002-6937-3740
https://orcid.org/0000-0002-9244-472X
https://orcid.org/0000-0003-2900-4577
https://orcid.org/0000-0001-7148-9665
https://orcid.org/0000-0001-9106-6205
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author Savidis, Nickolaos
Jolly, Sunny
Datta, Bianca
Karydis, Thrasyvoulos
Bove, V. Michael, Jr.
author2 Program in Media Arts and Sciences (Massachusetts Institute of Technology)
author_facet Program in Media Arts and Sciences (Massachusetts Institute of Technology)
Savidis, Nickolaos
Jolly, Sunny
Datta, Bianca
Karydis, Thrasyvoulos
Bove, V. Michael, Jr.
author_sort Savidis, Nickolaos
collection MIT
description We have previously introduced an anisotropic leaky-mode modulator as a waveguide-based, acousto-optic solution for spatial light modulation in holographic video display systems. Waveguide fabrication for these and similar surface acoustic wave devices relies on proton exchange of a lithium niobate substrate, which involves the immersion of the substrate in an acid melt. While simple and effective, waveguide depth and index profiles resulting from proton exchange are often non-uniform over the device length or inconsistent between waveguides fabricated at different times using the same melt and annealing parameters. In contrast to proton exchange, direct writing of waveguides has the appeal of simplifying fabrication (as these methods are inherently maskless) and the potential of fine and consistent control over waveguide depth and index profiles. In this paper, we explore femtosecond laser micromachining as an alternative to proton exchange in the fabrication of waveguides for anisotropic leaky-mode modulators.
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spelling mit-1721.1/1165882022-10-01T00:02:09Z Fabrication of waveguide spatial light modulators via femtosecond laser micromachining Savidis, Nickolaos Jolly, Sunny Datta, Bianca Karydis, Thrasyvoulos Bove, V. Michael, Jr. Program in Media Arts and Sciences (Massachusetts Institute of Technology) Savidis, Nickolaos Jolly, Sunny Datta, Bianca Karydis, Thrasyvoulos Bove Jr, V Michael We have previously introduced an anisotropic leaky-mode modulator as a waveguide-based, acousto-optic solution for spatial light modulation in holographic video display systems. Waveguide fabrication for these and similar surface acoustic wave devices relies on proton exchange of a lithium niobate substrate, which involves the immersion of the substrate in an acid melt. While simple and effective, waveguide depth and index profiles resulting from proton exchange are often non-uniform over the device length or inconsistent between waveguides fabricated at different times using the same melt and annealing parameters. In contrast to proton exchange, direct writing of waveguides has the appeal of simplifying fabrication (as these methods are inherently maskless) and the potential of fine and consistent control over waveguide depth and index profiles. In this paper, we explore femtosecond laser micromachining as an alternative to proton exchange in the fabrication of waveguides for anisotropic leaky-mode modulators. 2018-06-26T12:14:42Z 2018-06-26T12:14:42Z 2016-03 2018-03-16T15:09:49Z Article http://purl.org/eprint/type/ConferencePaper 0277-786X http://hdl.handle.net/1721.1/116588 Savidis, Nickolaos, Sundeep Jolly, Bianca Datta, Thrasyvoulos Karydis, and V. M. Bove. “Fabrication of Waveguide Spatial Light Modulators via Femtosecond Laser Micromachining.” Edited by Georg von Freymann, Winston V. Schoenfeld, and Raymond C. Rumpf. Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX (March 16, 2016). https://orcid.org/0000-0002-6937-3740 https://orcid.org/0000-0002-9244-472X https://orcid.org/0000-0003-2900-4577 https://orcid.org/0000-0001-7148-9665 https://orcid.org/0000-0001-9106-6205 http://dx.doi.org/10.1117/12.2209651 Proceedings of SPIE--the Society of Photo-Optical Instrumentation Engineers Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf SPIE, the International Society of Optical Engineering SPIE
spellingShingle Savidis, Nickolaos
Jolly, Sunny
Datta, Bianca
Karydis, Thrasyvoulos
Bove, V. Michael, Jr.
Fabrication of waveguide spatial light modulators via femtosecond laser micromachining
title Fabrication of waveguide spatial light modulators via femtosecond laser micromachining
title_full Fabrication of waveguide spatial light modulators via femtosecond laser micromachining
title_fullStr Fabrication of waveguide spatial light modulators via femtosecond laser micromachining
title_full_unstemmed Fabrication of waveguide spatial light modulators via femtosecond laser micromachining
title_short Fabrication of waveguide spatial light modulators via femtosecond laser micromachining
title_sort fabrication of waveguide spatial light modulators via femtosecond laser micromachining
url http://hdl.handle.net/1721.1/116588
https://orcid.org/0000-0002-6937-3740
https://orcid.org/0000-0002-9244-472X
https://orcid.org/0000-0003-2900-4577
https://orcid.org/0000-0001-7148-9665
https://orcid.org/0000-0001-9106-6205
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