Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation

Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation

The phosphosilicate glass (PSG), fabricated by tube furnace diffusion using a POCl₃ source, is widely used as a dopant source in the manufacturing of crystalline silicon solar cells. Although it has been a widely addressed research topic for a long time, there is still lack of a comprehensive unders...

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Bibliographic Details
Main Authors: Dastgheib-Shirazi, Amir, Min, Byungsul, Steyer, Michael, Hahn, Giso, del Cañizo, Carlos, Altermatt, Pietro P., Wagner, Hannes, Morishige, Ashley Elizabeth, Buonassisi, Anthony
Other Authors: Massachusetts Institute of Technology. Department of Mechanical Engineering
Format: Article
Published: American Institute of Physics (AIP) 2018
Online Access:http://hdl.handle.net/1721.1/118983
https://orcid.org/0000-0001-9352-8741
https://orcid.org/0000-0001-8345-4937

Internet

http://hdl.handle.net/1721.1/118983
https://orcid.org/0000-0001-9352-8741
https://orcid.org/0000-0001-8345-4937

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