Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation
The phosphosilicate glass (PSG), fabricated by tube furnace diffusion using a POCl₃ source, is widely used as a dopant source in the manufacturing of crystalline silicon solar cells. Although it has been a widely addressed research topic for a long time, there is still lack of a comprehensive unders...
| Main Authors: | , , , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
American Institute of Physics (AIP)
2018
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| Online Access: | http://hdl.handle.net/1721.1/118983 https://orcid.org/0000-0001-9352-8741 https://orcid.org/0000-0001-8345-4937 |