Reduction of on-resistance and current crowding in quasi-vertical GaN power diodes

This paper studies the key parameters affecting on-resistance and current crowding in quasi-vertical GaN power devices by experiment and simulation. The current distribution in the drift region, n⁻-GaN, was found to be mainly determined by the sheet resistance of the current spreading layer, n⁺-GaN....

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Bibliographic Details
Main Authors: Hennig, Jonas, Dadgar, Armin, Zhang, Yuhao, Sun, Min, Piedra, Daniel, Palacios, Tomas
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: American Institute of Physics (AIP) 2018
Online Access:http://hdl.handle.net/1721.1/119022
https://orcid.org/0000-0002-2849-5653
https://orcid.org/0000-0003-4858-8264
https://orcid.org/0000-0002-8104-9097
https://orcid.org/0000-0002-2190-563X
Description
Summary:This paper studies the key parameters affecting on-resistance and current crowding in quasi-vertical GaN power devices by experiment and simulation. The current distribution in the drift region, n⁻-GaN, was found to be mainly determined by the sheet resistance of the current spreading layer, n⁺-GaN. The actual on-resistance of the drift region significantly depends on this current distribution rather than the intrinsic resistivity of the drift layer. As a result, the total specific on-resistance of quasi-vertical diodes shows a strong correlation with the device area and sheet resistance of the current spreading layer. By reducing the sheet resistance of the current spreading layer, the specific on-resistance of quasi-vertical GaN-on-Si power diodes has been reduced from ~10 mΩ x cm² to below 1 mΩ x cm². Design space of the specific on-resistance at different breakdown voltage levels has also been revealed in optimized quasi-vertical GaN power diodes.