Real time in-situ monitoring and control of silicon epitaxy by Fourier transform infrared spectroscopy
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
| Published: |
Massachusetts Institute of Technology
2005
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/12011 |
| _version_ | 1811089261189922816 |
|---|---|
| author | Zhou, Zen-Hong |
| author2 | Rafael Reif. |
| author_facet | Rafael Reif. Zhou, Zen-Hong |
| author_sort | Zhou, Zen-Hong |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. |
| first_indexed | 2024-09-23T14:16:24Z |
| format | Thesis |
| id | mit-1721.1/12011 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T14:16:24Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/120112019-04-10T18:36:16Z Real time in-situ monitoring and control of silicon epitaxy by Fourier transform infrared spectroscopy Zhou, Zen-Hong Rafael Reif. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. Includes bibliographical references (p. 170-182). by Zhen-Hong Zhou. Ph.D. 2005-08-16T21:52:46Z 2005-08-16T21:52:46Z 1994 1994 Thesis http://hdl.handle.net/1721.1/12011 31262733 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 182 p. 14400038 bytes 14399798 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Zhou, Zen-Hong Real time in-situ monitoring and control of silicon epitaxy by Fourier transform infrared spectroscopy |
| title | Real time in-situ monitoring and control of silicon epitaxy by Fourier transform infrared spectroscopy |
| title_full | Real time in-situ monitoring and control of silicon epitaxy by Fourier transform infrared spectroscopy |
| title_fullStr | Real time in-situ monitoring and control of silicon epitaxy by Fourier transform infrared spectroscopy |
| title_full_unstemmed | Real time in-situ monitoring and control of silicon epitaxy by Fourier transform infrared spectroscopy |
| title_short | Real time in-situ monitoring and control of silicon epitaxy by Fourier transform infrared spectroscopy |
| title_sort | real time in situ monitoring and control of silicon epitaxy by fourier transform infrared spectroscopy |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/12011 |
| work_keys_str_mv | AT zhouzenhong realtimeinsitumonitoringandcontrolofsiliconepitaxybyfouriertransforminfraredspectroscopy |