Real time in-situ monitoring and control of silicon epitaxy by Fourier transform infrared spectroscopy
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Main Author: | Zhou, Zen-Hong |
---|---|
Other Authors: | Rafael Reif. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2005
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/12011 |
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