Applications of reference cycle building and K-shape clustering for anomaly detection in the semiconductor manufacturing process

Applications of reference cycle building and K-shape clustering for anomaly detection in the semiconductor manufacturing process

Thesis: M. Eng. in Advanced Manufacturing and Design, Massachusetts Institute of Technology, Department of Mechanical Engineering, 2018.

Bibliographic Details
Main Author: He, Han, M. Eng Massachusetts Institute of Technology
Other Authors: Duane S. Boning.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2019
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/120246

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