CMOS nanofluidics
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2018.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2019
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| Online Access: | http://hdl.handle.net/1721.1/120374 |
| _version_ | 1811073588397080576 |
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| author | Meng, Huaiyu |
| author2 | Rajeev J. Ram. |
| author_facet | Rajeev J. Ram. Meng, Huaiyu |
| author_sort | Meng, Huaiyu |
| collection | MIT |
| description | Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2018. |
| first_indexed | 2024-09-23T09:35:21Z |
| format | Thesis |
| id | mit-1721.1/120374 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T09:35:21Z |
| publishDate | 2019 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/1203742019-04-12T23:07:52Z CMOS nanofluidics Complementary metal oxide semiconductor nanofluidics Meng, Huaiyu Rajeev J. Ram. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2018. This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections. Cataloged from student-submitted PDF version of thesis. Includes bibliographical references (pages 217-226). Diagnostic tests are essential to medical practice. In vitro diagnostics is a market worth US$ 40-45 billion. Diagnostic tests are usually conducted in centralized laboratories, equipped with expensive instrumentation and staffed with trained personnel. An important part of clinical diagnosis involves protein and DNA sensing. Significant effort is made to make protein and DNA sensing more accessible and affordable, through micro and nano-technologies. However, typical commercial and academic devices for molecular sensing suffered needs for external equipment, high cost and large form factors. In this work, we propose a self-contained point-of-care platform based on complementary metal oxide semiconductor (CMOS). CMOS platform has the capability of pattern features at the scale of nanometers. Important electronic functions in bio-sensing, such as amplifiers, counters and drivers are routinely implemented in CMOS. With the introduction of photonic and nanofluidic functionalities in this thesis, a CMOS chip can potentially perform biomolecular sensing without the aid of external equipment, hence becoming true lab-on-chip devices. This thesis presents the methods developed to introduce nanofluidic and photonic devices in commercial CMOS chips. We first introduce a method to fabricate nanofluidic channels in CMOS by using the transistor gate polysilicon as a sacrificial layer. A nanochannel with critical dimension of 100nm and length of 200 [mu]m is fabricated. Actuation and separation of bio-molecules in the nanochannel with electrophoresis is demonstrated. We then incorporate avalanche photodiodes (APD) in CMOS. Additionally, a packaging method is introduced to work with CMOS chips with size of a few square millimeters. With components mentioned above, clinical applications, such as gene mapping for virus identification and protein separation for cancer diagnosis and monitoring, could potentially run on a chip without external equipment. by Huaiyu Meng. Ph. D. 2019-02-14T15:22:18Z 2019-02-14T15:22:18Z 2018 2018 Thesis http://hdl.handle.net/1721.1/120374 1084273349 eng MIT theses are protected by copyright. They may be viewed, downloaded, or printed from this source but further reproduction or distribution in any format is prohibited without written permission. http://dspace.mit.edu/handle/1721.1/7582 226 pages application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science. Meng, Huaiyu CMOS nanofluidics |
| title | CMOS nanofluidics |
| title_full | CMOS nanofluidics |
| title_fullStr | CMOS nanofluidics |
| title_full_unstemmed | CMOS nanofluidics |
| title_short | CMOS nanofluidics |
| title_sort | cmos nanofluidics |
| topic | Electrical Engineering and Computer Science. |
| url | http://hdl.handle.net/1721.1/120374 |
| work_keys_str_mv | AT menghuaiyu cmosnanofluidics AT menghuaiyu complementarymetaloxidesemiconductornanofluidics |