Rectangular photonic crystal nanobeam cavities in bulk diamond

We demonstrate the fabrication of photonic crystal nanobeam cavities with rectangular cross section into bulk diamond. In simulation, these cavities have an unloaded quality (Q) factor of over 1 × 106. Measured cavity resonances show fundamental modes with spectrometer-limited Q factors ≥14×103 with...

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Bibliographic Details
Main Authors: Mouradian, Sara L, Wan, Noel Heng Loon, Shroder, Tim, Englund, Dirk R.
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:English
Published: AIP Publishing 2019
Online Access:https://hdl.handle.net/1721.1/121349

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