Highly uniform silicon field emitter arrays fabricated using a trilevel resist process

Thesis: S.M., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2019

Bibliographic Details
Main Author:	Karaulac, Nedeljko.
Other Authors:	Akintunde I. Akinwande.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2019
Subjects:	Electrical Engineering and Computer Science.
Online Access:	https://hdl.handle.net/1721.1/122550

Internet

https://hdl.handle.net/1721.1/122550