Design, fabrication, and characterization of a compact magnetron sputtering system for micro/nano fabrication

Design, fabrication, and characterization of a compact magnetron sputtering system for micro/nano fabrication

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2019

Bibliographic Details
Main Author: Hsing, Mitchell David.
Other Authors: Martin A. Schmidt.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2019
Subjects:
Electrical Engineering and Computer Science.
Online Access:https://hdl.handle.net/1721.1/122559

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