Laser direct-write fabrication of MEMS
Thesis: Ph. D., Massachusetts Institute of Technology, School of Architecture and Planning, Program in Media Arts and Sciences, 2019
Main Author: | Patil, Prashant(Prashant Tarachand) |
---|---|
Other Authors: | Neil Gershenfeld. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2020
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Subjects: | |
Online Access: | https://hdl.handle.net/1721.1/124084 |
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