A white light interferometer for improved achromatic holographic lithography
Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993.
| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/12436 |
| _version_ | 1811083995153170432 |
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| author | Shah, Satyen N. (Satyen Navin) |
| author2 | Henry I. Smith. |
| author_facet | Henry I. Smith. Shah, Satyen N. (Satyen Navin) |
| author_sort | Shah, Satyen N. (Satyen Navin) |
| collection | MIT |
| description | Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993. |
| first_indexed | 2024-09-23T12:42:51Z |
| format | Thesis |
| id | mit-1721.1/12436 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T12:42:51Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/124362019-04-12T12:19:01Z A white light interferometer for improved achromatic holographic lithography Shah, Satyen N. (Satyen Navin) Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993. Includes bibliographical references (leaf 27). by Satyen N. Shah. B.S. 2005-08-15T23:37:01Z 2005-08-15T23:37:01Z 1993 1993 Thesis http://hdl.handle.net/1721.1/12436 29737097 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 27 leaves 1507131 bytes 1506892 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Shah, Satyen N. (Satyen Navin) A white light interferometer for improved achromatic holographic lithography |
| title | A white light interferometer for improved achromatic holographic lithography |
| title_full | A white light interferometer for improved achromatic holographic lithography |
| title_fullStr | A white light interferometer for improved achromatic holographic lithography |
| title_full_unstemmed | A white light interferometer for improved achromatic holographic lithography |
| title_short | A white light interferometer for improved achromatic holographic lithography |
| title_sort | white light interferometer for improved achromatic holographic lithography |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/12436 |
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