Ultrathin ceramic piezoelectric films via room-temperature electrospray deposition of ZnO nanoparticles for printed GHz devices

High-frequency devices are key enablers of state-of-the-art electronics used in a wide and diverse range of exciting applications such as inertial navigation, communications, power conversion, medicine, and parallel computing. However, high-frequency additively manufactured piezoelectric devices are...

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Bibliographic Details
Main Authors: García-Farrera, Brenda, Velásquez-García, Luis F.
Other Authors: Massachusetts Institute of Technology. Microsystems Technology Laboratories
Format: Article
Published: American Chemical Society (ACS) 2020
Subjects:
Online Access:https://hdl.handle.net/1721.1/124878