Oxygen-induced giant grain growth in Ag films
Thin film crystallites typically exhibit normal or abnormal growth with maximum grain size limited by energetic and geometric constraints. Although epitaxial methods have been used to produce large single crystal regions, they impose limitations that preclude some compelling applications. The genera...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
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AIP Publishing
2020
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| Online Access: | https://hdl.handle.net/1721.1/125678 |
| _version_ | 1826209872566288384 |
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| author | Birnbaum, A.J. Thompson, Carl Vernette Steuben, J.C. Iliopoulos, A.P. Michopoulos, J.G. |
| author2 | MIT Materials Research Laboratory |
| author_facet | MIT Materials Research Laboratory Birnbaum, A.J. Thompson, Carl Vernette Steuben, J.C. Iliopoulos, A.P. Michopoulos, J.G. |
| author_sort | Birnbaum, A.J. |
| collection | MIT |
| description | Thin film crystallites typically exhibit normal or abnormal growth with maximum grain size limited by energetic and geometric constraints. Although epitaxial methods have been used to produce large single crystal regions, they impose limitations that preclude some compelling applications. The generation of giant grain thin film materials has broad implications for fundamental property analysis and applications. This work details the production of giant grains in Ag films (2.5 μm-thick), ranging in size from 50 μm to 1 mm, on silicon nitride films upon silicon substrates. The presence of oxygen during film deposition plays a critical role in controlling grain size and orientation.
Crystallography, Crystallographic defects, Epitaxy, Transition metals, Thin film deposition, Thermal effects, X-ray diffraction, Chemical elements, Mechanical stress |
| first_indexed | 2024-09-23T14:33:31Z |
| format | Article |
| id | mit-1721.1/125678 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T14:33:31Z |
| publishDate | 2020 |
| publisher | AIP Publishing |
| record_format | dspace |
| spelling | mit-1721.1/1256782022-09-29T09:51:21Z Oxygen-induced giant grain growth in Ag films Birnbaum, A.J. Thompson, Carl Vernette Steuben, J.C. Iliopoulos, A.P. Michopoulos, J.G. MIT Materials Research Laboratory Massachusetts Institute of Technology. Department of Materials Science and Engineering Thin film crystallites typically exhibit normal or abnormal growth with maximum grain size limited by energetic and geometric constraints. Although epitaxial methods have been used to produce large single crystal regions, they impose limitations that preclude some compelling applications. The generation of giant grain thin film materials has broad implications for fundamental property analysis and applications. This work details the production of giant grains in Ag films (2.5 μm-thick), ranging in size from 50 μm to 1 mm, on silicon nitride films upon silicon substrates. The presence of oxygen during film deposition plays a critical role in controlling grain size and orientation. Crystallography, Crystallographic defects, Epitaxy, Transition metals, Thin film deposition, Thermal effects, X-ray diffraction, Chemical elements, Mechanical stress United States. Office of Naval Research (ONR/NRL Core funding) 2020-06-04T20:20:00Z 2020-06-04T20:20:00Z 2017-10 2017-08 2019-09-24T16:53:06Z Article http://purl.org/eprint/type/JournalArticle 0003-6951 1077-3118 https://hdl.handle.net/1721.1/125678 Birnbaum, A.J., C.V. Thompson, J.C. Steuben et al. "Oxygen-induced giant grain growth in Ag films." Appl. Phys. Lett. 111, 163107 (2017). © 2017 U.S. Government. en https://dx.doi.org/10.1063/1.4998741 Applied Physics Letters Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf AIP Publishing Other repository |
| spellingShingle | Birnbaum, A.J. Thompson, Carl Vernette Steuben, J.C. Iliopoulos, A.P. Michopoulos, J.G. Oxygen-induced giant grain growth in Ag films |
| title | Oxygen-induced giant grain growth in Ag films |
| title_full | Oxygen-induced giant grain growth in Ag films |
| title_fullStr | Oxygen-induced giant grain growth in Ag films |
| title_full_unstemmed | Oxygen-induced giant grain growth in Ag films |
| title_short | Oxygen-induced giant grain growth in Ag films |
| title_sort | oxygen induced giant grain growth in ag films |
| url | https://hdl.handle.net/1721.1/125678 |
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