Broadband couplers for hybrid silicon-chalcogenide glass photonic integrated circuits
We report on the design, fabrication and testing of three types of coupling structures for hybrid chalcogenide glass Ge23Sb7S70-Silicon (GeSbS-Si) photonic integrated circuit platforms. The first type is a fully etched GeSbS grating coupler defined directly in the GeSbS film. Coupling losses of 5.3...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
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The Optical Society
2020
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| Online Access: | https://hdl.handle.net/1721.1/128530 |
| _version_ | 1826211196563357696 |
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| author | Shen, Bin Lin, Hongtao Merget, Florian Azadeh, Saeed Sharif Li, Chao Lo, Guo-Qiang Richardson, Kathleen A. Hu, Juejun Witzens, Jeremy |
| author2 | Massachusetts Institute of Technology. Department of Materials Science and Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Materials Science and Engineering Shen, Bin Lin, Hongtao Merget, Florian Azadeh, Saeed Sharif Li, Chao Lo, Guo-Qiang Richardson, Kathleen A. Hu, Juejun Witzens, Jeremy |
| author_sort | Shen, Bin |
| collection | MIT |
| description | We report on the design, fabrication and testing of three types of coupling structures for hybrid chalcogenide glass Ge23Sb7S70-Silicon (GeSbS-Si) photonic integrated circuit platforms. The first type is a fully etched GeSbS grating coupler defined directly in the GeSbS film. Coupling losses of 5.3 dB and waveguide-to-waveguide back-reflections of 3.4% were measured at a wavelength of 1553 nm. Hybrid GeSbS-to-Si butt couplers and adiabatic couplers transmitting light between GeSbS and Si single-mode waveguides were further developed. The hybrid butt couplers (HBCs) feature coupling losses of 2.7 dB and 9.2% back-reflection. The hybrid adiabatic couplers (HACs) exhibit coupling losses of 0.7 dB and negligible back-reflection. Both HBCs and HACs have passbands exceeding the 100 nm measurement range of the test setup. GeSbS grating couplers and GeSbS-to-Si waveguide couplers can be co-fabricated in the same process flow, providing, for example, a means to first couple high optical power levels required for nonlinear signal processing directly into GeSbS waveguides and to later transition into Si waveguides after attenuation of the pump. Moreover, GeSbS waveguides and HBC transitions have been fabricated on post-processed silicon photonics chips obtained from a commercially available foundry service, with a previously deposited 2 μm thick top waveguide cladding. This fabrication protocol demonstrates the compatibility of the developed integration scheme with standard silicon photonics technology with a complete back-end-of-line process. ©2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. |
| first_indexed | 2024-09-23T15:02:25Z |
| format | Article |
| id | mit-1721.1/128530 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T15:02:25Z |
| publishDate | 2020 |
| publisher | The Optical Society |
| record_format | dspace |
| spelling | mit-1721.1/1285302022-10-02T00:10:59Z Broadband couplers for hybrid silicon-chalcogenide glass photonic integrated circuits Shen, Bin Lin, Hongtao Merget, Florian Azadeh, Saeed Sharif Li, Chao Lo, Guo-Qiang Richardson, Kathleen A. Hu, Juejun Witzens, Jeremy Massachusetts Institute of Technology. Department of Materials Science and Engineering We report on the design, fabrication and testing of three types of coupling structures for hybrid chalcogenide glass Ge23Sb7S70-Silicon (GeSbS-Si) photonic integrated circuit platforms. The first type is a fully etched GeSbS grating coupler defined directly in the GeSbS film. Coupling losses of 5.3 dB and waveguide-to-waveguide back-reflections of 3.4% were measured at a wavelength of 1553 nm. Hybrid GeSbS-to-Si butt couplers and adiabatic couplers transmitting light between GeSbS and Si single-mode waveguides were further developed. The hybrid butt couplers (HBCs) feature coupling losses of 2.7 dB and 9.2% back-reflection. The hybrid adiabatic couplers (HACs) exhibit coupling losses of 0.7 dB and negligible back-reflection. Both HBCs and HACs have passbands exceeding the 100 nm measurement range of the test setup. GeSbS grating couplers and GeSbS-to-Si waveguide couplers can be co-fabricated in the same process flow, providing, for example, a means to first couple high optical power levels required for nonlinear signal processing directly into GeSbS waveguides and to later transition into Si waveguides after attenuation of the pump. Moreover, GeSbS waveguides and HBC transitions have been fabricated on post-processed silicon photonics chips obtained from a commercially available foundry service, with a previously deposited 2 μm thick top waveguide cladding. This fabrication protocol demonstrates the compatibility of the developed integration scheme with standard silicon photonics technology with a complete back-end-of-line process. ©2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. Deutsche Forschungsgemeinschaft (DFG) (403153975) 2020-11-18T22:42:15Z 2020-11-18T22:42:15Z 2019-04 2019-04 2020-09-11T17:44:39Z Article http://purl.org/eprint/type/JournalArticle 1094-4087 https://hdl.handle.net/1721.1/128530 Shen, Bin et al., "Broadband couplers for hybrid silicon-chalcogenide glass photonic integrated circuits." Optics Express 27, 10 (May 2019): 13781-92 doi. 10.1364/OE.27.013781 ©2019 Authors en https://dx.doi.org/10.1364/OE.27.013781 Optics Express Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf The Optical Society OSA Publishing |
| spellingShingle | Shen, Bin Lin, Hongtao Merget, Florian Azadeh, Saeed Sharif Li, Chao Lo, Guo-Qiang Richardson, Kathleen A. Hu, Juejun Witzens, Jeremy Broadband couplers for hybrid silicon-chalcogenide glass photonic integrated circuits |
| title | Broadband couplers for hybrid silicon-chalcogenide glass photonic integrated circuits |
| title_full | Broadband couplers for hybrid silicon-chalcogenide glass photonic integrated circuits |
| title_fullStr | Broadband couplers for hybrid silicon-chalcogenide glass photonic integrated circuits |
| title_full_unstemmed | Broadband couplers for hybrid silicon-chalcogenide glass photonic integrated circuits |
| title_short | Broadband couplers for hybrid silicon-chalcogenide glass photonic integrated circuits |
| title_sort | broadband couplers for hybrid silicon chalcogenide glass photonic integrated circuits |
| url | https://hdl.handle.net/1721.1/128530 |
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