Surface transfer doping of diamond for power electronics

Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, September, 2020

Bibliographic Details
Main Author: Al Johani, Ebrahim Dakhil.
Other Authors: Jesus A. del Alamo.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2021
Subjects:
Online Access:https://hdl.handle.net/1721.1/129079
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author Al Johani, Ebrahim Dakhil.
author2 Jesus A. del Alamo.
author_facet Jesus A. del Alamo.
Al Johani, Ebrahim Dakhil.
author_sort Al Johani, Ebrahim Dakhil.
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description Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, September, 2020
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spelling mit-1721.1/1290792021-01-07T03:07:37Z Surface transfer doping of diamond for power electronics Al Johani, Ebrahim Dakhil. Jesus A. del Alamo. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Electrical Engineering and Computer Science. Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, September, 2020 Cataloged from student-submitted PDF of thesis. Includes bibliographical references (pages 77-80). The quest for a suitable wide-bandgap semiconductor for high-power and high-frequency applications is well motivated; wide-bandgap semiconductors generally exhibit a high breakdown field and can therefore support a high voltage over short distances. Diamond (Bandgap of 5.5 eV) in particular is an attractive prospect since its thermal conductivity and radiation hardness well surpass other wide-bandgap semiconductors. However, practical transistors require the ability to engineer the charge density through substitutional doping which has proven to be difficult considering the strong covalent bonds that make up bulk diamond. In this work, we utilize hydrogen-passivated diamond surface along with surface acceptors to generate a highly conductive 2D hole sheet at the surface with carrier densities going up to 10¹⁴ cm⁻². Surface transfer doping using stable high electron affinity transition-metal oxides (TMO) such as WO₃ in conjunction with the novel contact-first process explored in this work shows great promise on advancing process stability while attaining the high current densities desired in the future of power diamond transistors. We closely examine the H-terminated diamond/TMO interface using a numerical approach based on a Schrödinger-Poisson solver package. We identify key inconsistencies in the generic valence-to-conduction transfer model for both shallow and deep TMO electron affinity regimes. We report that introducing deep level impurities in the TMO have shown improvements to the effect of bias modulation and agreement with experiments for low TMO affinities. A solution for engineering a preexisting TMO with fixed affinity and trap level is presented through TMO thickness engineering. The methods explored in this work show promise towards the enhancement of diamond conductivity and reproducibility. by Ebrahim D. Aljohani. M. Eng. M.Eng. Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science 2021-01-06T17:38:41Z 2021-01-06T17:38:41Z 2020 2020 Thesis https://hdl.handle.net/1721.1/129079 1227273886 eng MIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided. http://dspace.mit.edu/handle/1721.1/7582 80 pages application/pdf Massachusetts Institute of Technology
spellingShingle Electrical Engineering and Computer Science.
Al Johani, Ebrahim Dakhil.
Surface transfer doping of diamond for power electronics
title Surface transfer doping of diamond for power electronics
title_full Surface transfer doping of diamond for power electronics
title_fullStr Surface transfer doping of diamond for power electronics
title_full_unstemmed Surface transfer doping of diamond for power electronics
title_short Surface transfer doping of diamond for power electronics
title_sort surface transfer doping of diamond for power electronics
topic Electrical Engineering and Computer Science.
url https://hdl.handle.net/1721.1/129079
work_keys_str_mv AT aljohaniebrahimdakhil surfacetransferdopingofdiamondforpowerelectronics