A MEMS Magnetic-Based Vibration Energy Harvester
This paper presents the design, analysis and integrated fabrication of a MEMS magnetic-based vibration energy harvester targeted for machine health monitoring. The design consists of Si-springs, permanent magnets as mass, and coils wound on the top and bottom side of the harvester package for mechan...
| Main Authors: | , , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2021
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| Online Access: | https://hdl.handle.net/1721.1/129412 |
| _version_ | 1826194631755300864 |
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| author | Shin, Abraham Radhakrishna, Ujwal Yang, Yuechen Zhang, Q. Gu, L. Riehl, P. Chandrakasan, Anantha P Lang, Jeffrey H |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Shin, Abraham Radhakrishna, Ujwal Yang, Yuechen Zhang, Q. Gu, L. Riehl, P. Chandrakasan, Anantha P Lang, Jeffrey H |
| author_sort | Shin, Abraham |
| collection | MIT |
| description | This paper presents the design, analysis and integrated fabrication of a MEMS magnetic-based vibration energy harvester targeted for machine health monitoring. The design consists of Si-springs, permanent magnets as mass, and coils wound on the top and bottom side of the harvester package for mechanical-to-electrical energy conversion based on the Lorentz-force principle. The harvester is optimized to have its translational resonant-mode match external vibrations while separating higher-order modes. Mechanical and magnetic optimization of the harvester is carried out together with optimization of its power and control electronics in order to provide maximum output power from a vibration input that can vary its frequency by ±5%. The harvester achieves an open-circuit voltage amplitude of 145 mV and delivers 165 μW to a matched load at the resonance frequency of 45.7 Hz. |
| first_indexed | 2024-09-23T09:58:55Z |
| format | Article |
| id | mit-1721.1/129412 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T09:58:55Z |
| publishDate | 2021 |
| publisher | IOP Publishing |
| record_format | dspace |
| spelling | mit-1721.1/1294122022-09-26T15:00:03Z A MEMS Magnetic-Based Vibration Energy Harvester Shin, Abraham Radhakrishna, Ujwal Yang, Yuechen Zhang, Q. Gu, L. Riehl, P. Chandrakasan, Anantha P Lang, Jeffrey H Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Research Laboratory of Electronics This paper presents the design, analysis and integrated fabrication of a MEMS magnetic-based vibration energy harvester targeted for machine health monitoring. The design consists of Si-springs, permanent magnets as mass, and coils wound on the top and bottom side of the harvester package for mechanical-to-electrical energy conversion based on the Lorentz-force principle. The harvester is optimized to have its translational resonant-mode match external vibrations while separating higher-order modes. Mechanical and magnetic optimization of the harvester is carried out together with optimization of its power and control electronics in order to provide maximum output power from a vibration input that can vary its frequency by ±5%. The harvester achieves an open-circuit voltage amplitude of 145 mV and delivers 165 μW to a matched load at the resonance frequency of 45.7 Hz. 2021-01-13T20:54:34Z 2021-01-13T20:54:34Z 2018-07 2019-05-22T16:12:39Z Article http://purl.org/eprint/type/JournalArticle 1742-6588 1742-6596 https://hdl.handle.net/1721.1/129412 Shin, A. et al. "A MEMS Magnetic-Based Vibration Energy Harvester." 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Journal of Physics: Conference Series, 1052, IOP Publishing, 2018, 012082. en http://dx.doi.org/10.1088/1742-6596/1052/1/012082 Journal of Physics: Conference Series Creative Commons Attribution 3.0 unported license https://creativecommons.org/licenses/by/3.0/ application/pdf IOP Publishing IOP Publishing |
| spellingShingle | Shin, Abraham Radhakrishna, Ujwal Yang, Yuechen Zhang, Q. Gu, L. Riehl, P. Chandrakasan, Anantha P Lang, Jeffrey H A MEMS Magnetic-Based Vibration Energy Harvester |
| title | A MEMS Magnetic-Based Vibration Energy Harvester |
| title_full | A MEMS Magnetic-Based Vibration Energy Harvester |
| title_fullStr | A MEMS Magnetic-Based Vibration Energy Harvester |
| title_full_unstemmed | A MEMS Magnetic-Based Vibration Energy Harvester |
| title_short | A MEMS Magnetic-Based Vibration Energy Harvester |
| title_sort | mems magnetic based vibration energy harvester |
| url | https://hdl.handle.net/1721.1/129412 |
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