A MEMS Magnetic-Based Vibration Energy Harvester

A MEMS Magnetic-Based Vibration Energy Harvester

This paper presents the design, analysis and integrated fabrication of a MEMS magnetic-based vibration energy harvester targeted for machine health monitoring. The design consists of Si-springs, permanent magnets as mass, and coils wound on the top and bottom side of the harvester package for mechan...

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Bibliographic Details
Main Authors: Shin, Abraham, Radhakrishna, Ujwal, Yang, Yuechen, Zhang, Q., Gu, L., Riehl, P., Chandrakasan, Anantha P, Lang, Jeffrey H
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:English
Published: IOP Publishing 2021
Online Access:https://hdl.handle.net/1721.1/129412

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