Microstructural modification of thin films and its relation to the electromigration-limited reliability of VLSI interconnects
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1992.
Main Author: | Longworth, Hai Pham |
---|---|
Other Authors: | Carl V. Thompson. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2005
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/13114 |
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