Chemical vapour deposition
| Main Authors: | , , , , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group UK
2021
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| Online Access: | https://hdl.handle.net/1721.1/131818 |
| _version_ | 1826192457592733696 |
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| author | Sun, Luzhao Yuan, Guowen Gao, Libo Yang, Jieun Chhowalla, Manish Gharahcheshmeh, Meysam H Gleason, Karen K Choi, Yong S Hong, Byung H Liu, Zhongfan |
| author2 | Massachusetts Institute of Technology. Department of Chemical Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Chemical Engineering Sun, Luzhao Yuan, Guowen Gao, Libo Yang, Jieun Chhowalla, Manish Gharahcheshmeh, Meysam H Gleason, Karen K Choi, Yong S Hong, Byung H Liu, Zhongfan |
| author_sort | Sun, Luzhao |
| collection | MIT |
| first_indexed | 2024-09-23T09:14:12Z |
| format | Article |
| id | mit-1721.1/131818 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T09:14:12Z |
| publishDate | 2021 |
| publisher | Nature Publishing Group UK |
| record_format | dspace |
| spelling | mit-1721.1/1318182023-12-18T19:40:31Z Chemical vapour deposition Sun, Luzhao Yuan, Guowen Gao, Libo Yang, Jieun Chhowalla, Manish Gharahcheshmeh, Meysam H Gleason, Karen K Choi, Yong S Hong, Byung H Liu, Zhongfan Massachusetts Institute of Technology. Department of Chemical Engineering 2021-09-20T17:30:23Z 2021-09-20T17:30:23Z 2021-01-14 2021-01-15T04:21:05Z Article http://purl.org/eprint/type/JournalArticle https://hdl.handle.net/1721.1/131818 Nature Reviews Methods Primers. 2021 Jan 14;1(1):5 en https://doi.org/10.1038/s43586-020-00005-y Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ Springer Nature Limited application/pdf Nature Publishing Group UK Nature Publishing Group UK |
| spellingShingle | Sun, Luzhao Yuan, Guowen Gao, Libo Yang, Jieun Chhowalla, Manish Gharahcheshmeh, Meysam H Gleason, Karen K Choi, Yong S Hong, Byung H Liu, Zhongfan Chemical vapour deposition |
| title | Chemical vapour deposition |
| title_full | Chemical vapour deposition |
| title_fullStr | Chemical vapour deposition |
| title_full_unstemmed | Chemical vapour deposition |
| title_short | Chemical vapour deposition |
| title_sort | chemical vapour deposition |
| url | https://hdl.handle.net/1721.1/131818 |
| work_keys_str_mv | AT sunluzhao chemicalvapourdeposition AT yuanguowen chemicalvapourdeposition AT gaolibo chemicalvapourdeposition AT yangjieun chemicalvapourdeposition AT chhowallamanish chemicalvapourdeposition AT gharahcheshmehmeysamh chemicalvapourdeposition AT gleasonkarenk chemicalvapourdeposition AT choiyongs chemicalvapourdeposition AT hongbyungh chemicalvapourdeposition AT liuzhongfan chemicalvapourdeposition |