Chemical vapour deposition

Chemical vapour deposition

Bibliographic Details
Main Authors:	Sun, Luzhao, Yuan, Guowen, Gao, Libo, Yang, Jieun, Chhowalla, Manish, Gharahcheshmeh, Meysam H, Gleason, Karen K, Choi, Yong S, Hong, Byung H, Liu, Zhongfan
Other Authors:	Massachusetts Institute of Technology. Department of Chemical Engineering
Format:	Article
Language:	English
Published:	Nature Publishing Group UK 2021
Online Access:	https://hdl.handle.net/1721.1/131818

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