Quantitative modelling for optimization of the Czochralski growth of silicon
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/13204 |
| _version_ | 1811097317074272256 |
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| author | Kinney, Thomas Arthur |
| author2 | Robert A. Brown. |
| author_facet | Robert A. Brown. Kinney, Thomas Arthur |
| author_sort | Kinney, Thomas Arthur |
| collection | MIT |
| description | Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992. |
| first_indexed | 2024-09-23T16:57:43Z |
| format | Thesis |
| id | mit-1721.1/13204 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T16:57:43Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/132042019-04-11T14:09:19Z Quantitative modelling for optimization of the Czochralski growth of silicon Kinney, Thomas Arthur Robert A. Brown. Massachusetts Institute of Technology. Dept. of Chemical Engineering Chemical Engineering Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992. Includes bibliographical references (p. 279-296). by Thomas Arthur Kinney. Sc.D. 2005-08-15T16:56:08Z 2005-08-15T16:56:08Z 1992 1992 Thesis http://hdl.handle.net/1721.1/13204 26714193 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 296 p. 23645858 bytes 23645616 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Chemical Engineering Kinney, Thomas Arthur Quantitative modelling for optimization of the Czochralski growth of silicon |
| title | Quantitative modelling for optimization of the Czochralski growth of silicon |
| title_full | Quantitative modelling for optimization of the Czochralski growth of silicon |
| title_fullStr | Quantitative modelling for optimization of the Czochralski growth of silicon |
| title_full_unstemmed | Quantitative modelling for optimization of the Czochralski growth of silicon |
| title_short | Quantitative modelling for optimization of the Czochralski growth of silicon |
| title_sort | quantitative modelling for optimization of the czochralski growth of silicon |
| topic | Chemical Engineering |
| url | http://hdl.handle.net/1721.1/13204 |
| work_keys_str_mv | AT kinneythomasarthur quantitativemodellingforoptimizationoftheczochralskigrowthofsilicon |