Quantitative modelling for optimization of the Czochralski growth of silicon

Quantitative modelling for optimization of the Czochralski growth of silicon

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.

Bibliographic Details
Main Author:	Kinney, Thomas Arthur
Other Authors:	Robert A. Brown.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Chemical Engineering
Online Access:	http://hdl.handle.net/1721.1/13204

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