Photonic device sensitivity analysis methods: towards process variation-aware silicon photonics design
© COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only. Silicon photonics offers the ability to fabricate and integrate photonic and electronic components using existing integrated circuit fabrication infrastructure. Recent work seeks to understand the impact of IC process...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SPIE-Intl Soc Optical Eng
2021
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| Online Access: | https://hdl.handle.net/1721.1/132246 |