APA (7th ed.) Citation

Zhang, Z., McIlrath, M. B., & Boning, D. S. (2021). Adjoint-based particle defect yield modeling for silicon photonics. SPIE-Intl Soc Optical Eng.

Chicago Style (17th ed.) Citation

Zhang, Zhengxing, Michael B. McIlrath, and Duane S. Boning. Adjoint-based Particle Defect Yield Modeling for Silicon Photonics. SPIE-Intl Soc Optical Eng, 2021.

MLA (9th ed.) Citation

Zhang, Zhengxing, et al. Adjoint-based Particle Defect Yield Modeling for Silicon Photonics. SPIE-Intl Soc Optical Eng, 2021.