Adjoint-based particle defect yield modeling for silicon photonics

Adjoint-based particle defect yield modeling for silicon photonics

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© COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only. Integrated silicon photonics offers great potential for monolithic integrated photonic and electronic components using existing integrated circuit fabrication infrastructure. However, understanding of the impact of IC...

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Bibliographic Details
Main Authors:	Zhang, Zhengxing, McIlrath, Michael B, Boning, Duane S
Format:	Article
Language:	English
Published:	SPIE-Intl Soc Optical Eng 2021
Online Access:	https://hdl.handle.net/1721.1/132250

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