Adjoint-based particle defect yield modeling for silicon photonics
© COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only. Integrated silicon photonics offers great potential for monolithic integrated photonic and electronic components using existing integrated circuit fabrication infrastructure. However, understanding of the impact of IC...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
SPIE-Intl Soc Optical Eng
2021
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| Online Access: | https://hdl.handle.net/1721.1/132250 |
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Adjoint-based particle defect yield modeling for silicon photonics
Published 2022
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