Comparison of dielectric loss in titanium nitride and aluminum superconducting resonators
© 2020 Author(s). Lossy dielectrics are a significant source of decoherence in superconducting quantum circuits. In this report, we model and compare the dielectric loss in bulk and interfacial dielectrics in titanium nitride (TiN) and aluminum (Al) superconducting coplanar waveguide resonators. We...
| Main Authors: | , , , , , , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing
2021
|
| Online Access: | https://hdl.handle.net/1721.1/133723 |
| _version_ | 1826211905994227712 |
|---|---|
| author | Melville, A Calusine, G Woods, W Serniak, K Golden, E Niedzielski, BM Kim, DK Sevi, A Yoder, JL Dauler, EA Oliver, WD |
| author2 | Lincoln Laboratory |
| author_facet | Lincoln Laboratory Melville, A Calusine, G Woods, W Serniak, K Golden, E Niedzielski, BM Kim, DK Sevi, A Yoder, JL Dauler, EA Oliver, WD |
| author_sort | Melville, A |
| collection | MIT |
| description | © 2020 Author(s). Lossy dielectrics are a significant source of decoherence in superconducting quantum circuits. In this report, we model and compare the dielectric loss in bulk and interfacial dielectrics in titanium nitride (TiN) and aluminum (Al) superconducting coplanar waveguide resonators. We fabricate isotropically trenched resonators to produce a series of device geometries that accentuate a specific dielectric region's contribution to the resonator quality factor. While each dielectric region contributes significantly to loss in TiN devices, the metal-air interface dominates the loss in the Al devices. Furthermore, we evaluate the quality factor of each TiN resonator geometry with and without a post-process hydrofluoric etch and find that it reduced losses from the substrate-air interface, thereby improving the quality factor. |
| first_indexed | 2024-09-23T15:13:18Z |
| format | Article |
| id | mit-1721.1/133723 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T15:13:18Z |
| publishDate | 2021 |
| publisher | AIP Publishing |
| record_format | dspace |
| spelling | mit-1721.1/1337232023-03-15T17:25:42Z Comparison of dielectric loss in titanium nitride and aluminum superconducting resonators Melville, A Calusine, G Woods, W Serniak, K Golden, E Niedzielski, BM Kim, DK Sevi, A Yoder, JL Dauler, EA Oliver, WD Lincoln Laboratory Massachusetts Institute of Technology. Research Laboratory of Electronics Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science © 2020 Author(s). Lossy dielectrics are a significant source of decoherence in superconducting quantum circuits. In this report, we model and compare the dielectric loss in bulk and interfacial dielectrics in titanium nitride (TiN) and aluminum (Al) superconducting coplanar waveguide resonators. We fabricate isotropically trenched resonators to produce a series of device geometries that accentuate a specific dielectric region's contribution to the resonator quality factor. While each dielectric region contributes significantly to loss in TiN devices, the metal-air interface dominates the loss in the Al devices. Furthermore, we evaluate the quality factor of each TiN resonator geometry with and without a post-process hydrofluoric etch and find that it reduced losses from the substrate-air interface, thereby improving the quality factor. 2021-10-27T19:56:20Z 2021-10-27T19:56:20Z 2020 2021-03-24T13:37:18Z Article http://purl.org/eprint/type/JournalArticle https://hdl.handle.net/1721.1/133723 en 10.1063/5.0021950 Applied Physics Letters Creative Commons Attribution 4.0 International license https://creativecommons.org/licenses/by/4.0/ application/pdf AIP Publishing American Institute of Physics (AIP) |
| spellingShingle | Melville, A Calusine, G Woods, W Serniak, K Golden, E Niedzielski, BM Kim, DK Sevi, A Yoder, JL Dauler, EA Oliver, WD Comparison of dielectric loss in titanium nitride and aluminum superconducting resonators |
| title | Comparison of dielectric loss in titanium nitride and aluminum superconducting resonators |
| title_full | Comparison of dielectric loss in titanium nitride and aluminum superconducting resonators |
| title_fullStr | Comparison of dielectric loss in titanium nitride and aluminum superconducting resonators |
| title_full_unstemmed | Comparison of dielectric loss in titanium nitride and aluminum superconducting resonators |
| title_short | Comparison of dielectric loss in titanium nitride and aluminum superconducting resonators |
| title_sort | comparison of dielectric loss in titanium nitride and aluminum superconducting resonators |
| url | https://hdl.handle.net/1721.1/133723 |
| work_keys_str_mv | AT melvillea comparisonofdielectriclossintitaniumnitrideandaluminumsuperconductingresonators AT calusineg comparisonofdielectriclossintitaniumnitrideandaluminumsuperconductingresonators AT woodsw comparisonofdielectriclossintitaniumnitrideandaluminumsuperconductingresonators AT serniakk comparisonofdielectriclossintitaniumnitrideandaluminumsuperconductingresonators AT goldene comparisonofdielectriclossintitaniumnitrideandaluminumsuperconductingresonators AT niedzielskibm comparisonofdielectriclossintitaniumnitrideandaluminumsuperconductingresonators AT kimdk comparisonofdielectriclossintitaniumnitrideandaluminumsuperconductingresonators AT sevia comparisonofdielectriclossintitaniumnitrideandaluminumsuperconductingresonators AT yoderjl comparisonofdielectriclossintitaniumnitrideandaluminumsuperconductingresonators AT daulerea comparisonofdielectriclossintitaniumnitrideandaluminumsuperconductingresonators AT oliverwd comparisonofdielectriclossintitaniumnitrideandaluminumsuperconductingresonators |