Improved retention of phosphorus donors in germanium using a non-amorphizing fluorine co-implantation technique

Improved retention of phosphorus donors in germanium using a non-amorphizing fluorine co-implantation technique

© 2017 Author(s). Co-doping with fluorine is a potentially promising method for defect passivation to increase the donor electrical activation in highly doped n-type germanium. However, regular high dose donor-fluorine co-implants, followed by conventional thermal treatment of the germanium, typical...

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Bibliographic Details
Main Authors: Monmeyran, Corentin, Crowe, Iain F, Gwilliam, Russell M, Heidelberger, Christopher, Napolitani, Enrico, Pastor, David, Gandhi, Hemi H, Mazur, Eric, Michel, Jürgen, Agarwal, Anuradha M, Kimerling, Lionel C
Other Authors: Massachusetts Institute of Technology. Department of Materials Science and Engineering
Format: Article
Language:English
Published: AIP Publishing 2021
Online Access:https://hdl.handle.net/1721.1/134690

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