Reducing adhesion energy of nano-electro-mechanical relay contacts by self-assembled Perfluoro (2,3-Dimethylbutan-2-ol) coating
© 2019 Author(s). To enable energy-efficient electronic devices for the future, nano-electro-mechanical (NEM) relays are promising due to their high ON/OFF current ratio and potential for low operating voltage. To minimize hysteresis and, consequently, relay operating voltage, it is imperative to re...
Main Authors: | Fathipour, Sara, Almeida, Sergio Fabian, Ye, Zhixin Alice, Saha, Bivas, Niroui, Farnaz, King Liu, Tsu-Jae, Wu, Junqiao |
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Other Authors: | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
Format: | Article |
Language: | English |
Published: |
AIP Publishing
2021
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Online Access: | https://hdl.handle.net/1721.1/134812 |
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