Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides
© 2016 Author(s). We demonstrate a self-aligned lithographic technique for precision generation of nitrogen vacancy (NV) centers within photonic nanostructures on bulk diamond substrates. The process relies on a lithographic mask with nanoscale implantation apertures for NV creation, together with l...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
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AIP Publishing
2022
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| Online Access: | https://hdl.handle.net/1721.1/134990.2 |
| _version_ | 1811069738197975040 |
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| author | Schukraft, M. Zheng, J. Schröder, T. Mouradian, S. L. Walsh, M. Trusheim, M. E. Bakhru, H. Englund, D. R. |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Schukraft, M. Zheng, J. Schröder, T. Mouradian, S. L. Walsh, M. Trusheim, M. E. Bakhru, H. Englund, D. R. |
| author_sort | Schukraft, M. |
| collection | MIT |
| description | © 2016 Author(s). We demonstrate a self-aligned lithographic technique for precision generation of nitrogen vacancy (NV) centers within photonic nanostructures on bulk diamond substrates. The process relies on a lithographic mask with nanoscale implantation apertures for NV creation, together with larger features for producing waveguides and photonic nanocavities. This mask allows targeted nitrogen ion implantation, and precision dry etching of nanostructures on bulk diamond. We demonstrate high-yield generation of single NVs at pre-determined nanoscale target regions on suspended diamond waveguides. We report implantation into the mode maximum of diamond photonic crystal nanocavities with a single-NV per cavity yield of ∼26% and Purcell induced intensity enhancement of the zero-phonon line. The generation of NV centers aligned with diamond photonic structures marks an important tool for scalable production of optically coupled spin memories. |
| first_indexed | 2024-09-23T08:15:10Z |
| format | Article |
| id | mit-1721.1/134990.2 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T08:15:10Z |
| publishDate | 2022 |
| publisher | AIP Publishing |
| record_format | dspace |
| spelling | mit-1721.1/134990.22024-06-03T17:19:30Z Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides Schukraft, M. Zheng, J. Schröder, T. Mouradian, S. L. Walsh, M. Trusheim, M. E. Bakhru, H. Englund, D. R. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science © 2016 Author(s). We demonstrate a self-aligned lithographic technique for precision generation of nitrogen vacancy (NV) centers within photonic nanostructures on bulk diamond substrates. The process relies on a lithographic mask with nanoscale implantation apertures for NV creation, together with larger features for producing waveguides and photonic nanocavities. This mask allows targeted nitrogen ion implantation, and precision dry etching of nanostructures on bulk diamond. We demonstrate high-yield generation of single NVs at pre-determined nanoscale target regions on suspended diamond waveguides. We report implantation into the mode maximum of diamond photonic crystal nanocavities with a single-NV per cavity yield of ∼26% and Purcell induced intensity enhancement of the zero-phonon line. The generation of NV centers aligned with diamond photonic structures marks an important tool for scalable production of optically coupled spin memories. 2022-06-03T20:23:38Z 2021-10-27T20:10:12Z 2022-06-03T20:23:38Z 2016-05 2016-02 2019-06-14T14:01:39Z Article http://purl.org/eprint/type/JournalArticle 2378-0967 https://hdl.handle.net/1721.1/134990.2 en http://dx.doi.org/10.1063/1.4948746 APL Photonics Creative Commons Attribution 4.0 International license https://creativecommons.org/licenses/by/4.0/ application/octet-stream AIP Publishing American Institute of Physics (AIP) |
| spellingShingle | Schukraft, M. Zheng, J. Schröder, T. Mouradian, S. L. Walsh, M. Trusheim, M. E. Bakhru, H. Englund, D. R. Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides |
| title | Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides |
| title_full | Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides |
| title_fullStr | Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides |
| title_full_unstemmed | Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides |
| title_short | Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides |
| title_sort | invited article precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides |
| url | https://hdl.handle.net/1721.1/134990.2 |
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