Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides

Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides

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© 2016 Author(s). We demonstrate a self-aligned lithographic technique for precision generation of nitrogen vacancy (NV) centers within photonic nanostructures on bulk diamond substrates. The process relies on a lithographic mask with nanoscale implantation apertures for NV creation, together with l...

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Bibliographic Details
Main Authors: Schukraft, M., Zheng, J., Schröder, T., Mouradian, S. L., Walsh, M., Trusheim, M. E., Bakhru, H., Englund, D. R.
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:English
Published: AIP Publishing 2022
Online Access:https://hdl.handle.net/1721.1/134990.2

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