Source Shot Noise Mitigation in Focused Ion Beam Microscopy by Time-Resolved Measurement

Source Shot Noise Mitigation in Focused Ion Beam Microscopy by Time-Resolved Measurement

© 2020 Elsevier B.V. Focused ion beam microscopy suffers from source shot noise – random variation in the number of incident ions in any fixed dwell time – along with random variation in the number of detected secondary electrons per incident ion. This multiplicity of sources of randomness increases...

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Bibliographic Details
Main Authors: Peng, Minxu, Murray-Bruce, John, Berggren, Karl K, Goyal, Vivek K
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:English
Published: Elsevier BV 2021
Online Access:https://hdl.handle.net/1721.1/135193

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