Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation

© 2017 Optical Society of America. Towards building large-scale integrated photonic systems for quantum information processing, spatial and spectral alignment of single quantum systems to photonic nanocavities is required. Here, we demonstrate spatially targeted implantation of nitrogen vacancy (NV)...

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Main Authors: Schröder, T, Walsh, M, Zheng, J, Mouradian, S, Li, L, Malladi, G, Bakhru, H, Lu, M, Stein, A, Heuck, M, Englund, D
Format: Article
Language:English
Published: The Optical Society 2021
Online Access:https://hdl.handle.net/1721.1/135756
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author Schröder, T
Walsh, M
Zheng, J
Mouradian, S
Li, L
Malladi, G
Bakhru, H
Lu, M
Stein, A
Heuck, M
Englund, D
author_facet Schröder, T
Walsh, M
Zheng, J
Mouradian, S
Li, L
Malladi, G
Bakhru, H
Lu, M
Stein, A
Heuck, M
Englund, D
author_sort Schröder, T
collection MIT
description © 2017 Optical Society of America. Towards building large-scale integrated photonic systems for quantum information processing, spatial and spectral alignment of single quantum systems to photonic nanocavities is required. Here, we demonstrate spatially targeted implantation of nitrogen vacancy (NV) centers into the mode maximum of 2-d diamond photonic crystal cavities with quality factors up to 8000, achieving an average of 1:1 ± 0:2 NVs per cavity. Nearly all NV-cavity systems have significant emission intensity enhancement, reaching a cavity-fed spectrally selective intensity enhancement, Fint, of up to 93. Although spatial NV-cavity overlap is nearly guaranteed within about 40 nm, spectral tuning of the NV's zero-phonon-line (ZPL) is still necessary after fabrication. To demonstrate spectral control, we temperature tune a cavity into an NV ZPL, yielding FZPLint 5 at cryogenic temperatures.
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spelling mit-1721.1/1357562022-04-01T16:23:46Z Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation Schröder, T Walsh, M Zheng, J Mouradian, S Li, L Malladi, G Bakhru, H Lu, M Stein, A Heuck, M Englund, D © 2017 Optical Society of America. Towards building large-scale integrated photonic systems for quantum information processing, spatial and spectral alignment of single quantum systems to photonic nanocavities is required. Here, we demonstrate spatially targeted implantation of nitrogen vacancy (NV) centers into the mode maximum of 2-d diamond photonic crystal cavities with quality factors up to 8000, achieving an average of 1:1 ± 0:2 NVs per cavity. Nearly all NV-cavity systems have significant emission intensity enhancement, reaching a cavity-fed spectrally selective intensity enhancement, Fint, of up to 93. Although spatial NV-cavity overlap is nearly guaranteed within about 40 nm, spectral tuning of the NV's zero-phonon-line (ZPL) is still necessary after fabrication. To demonstrate spectral control, we temperature tune a cavity into an NV ZPL, yielding FZPLint 5 at cryogenic temperatures. 2021-10-27T20:29:09Z 2021-10-27T20:29:09Z 2017 2019-06-14T17:18:12Z Article http://purl.org/eprint/type/JournalArticle https://hdl.handle.net/1721.1/135756 Schroder, T., et al. "Scalable Fabrication of Coupled Nv Center-Photonic Crystal Cavity Systems by Self-Aligned N Ion Implantation." Optical Materials Express 7 5 (2017): 1514-24. en 10.1364/OME.7.001514 Optical Materials Express Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf The Optical Society OSA Publishing
spellingShingle Schröder, T
Walsh, M
Zheng, J
Mouradian, S
Li, L
Malladi, G
Bakhru, H
Lu, M
Stein, A
Heuck, M
Englund, D
Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation
title Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation
title_full Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation
title_fullStr Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation
title_full_unstemmed Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation
title_short Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation
title_sort scalable fabrication of coupled nv center photonic crystal cavity systems by self aligned n ion implantation
url https://hdl.handle.net/1721.1/135756
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