Sub-micron gate lithography in an MMIC production environment

Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1990, and Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1990.

Bibliographic Details
Main Author: Moran, Peter William
Other Authors: Rebecca M. Henderson and Jesús A. del Alamo.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/13600
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author Moran, Peter William
author2 Rebecca M. Henderson and Jesús A. del Alamo.
author_facet Rebecca M. Henderson and Jesús A. del Alamo.
Moran, Peter William
author_sort Moran, Peter William
collection MIT
description Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1990, and Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1990.
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institution Massachusetts Institute of Technology
language eng
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spelling mit-1721.1/136002022-01-26T20:57:06Z Sub-micron gate lithography in an MMIC production environment Moran, Peter William Rebecca M. Henderson and Jesús A. del Alamo. Massachusetts Institute of Technology. Department of Electrical Engineering Sloan School of Management Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Sloan School of Management Electrical Engineering Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1990, and Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1990. Includes bibliographical references (leaves 195-197). by Peter William Moran. M.S. 2005-08-10T22:16:04Z 2005-08-10T22:16:04Z 1990 1990 Thesis http://hdl.handle.net/1721.1/13600 24154943 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 199 leaves 12487268 bytes 12487026 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
spellingShingle Sloan School of Management
Electrical Engineering
Moran, Peter William
Sub-micron gate lithography in an MMIC production environment
title Sub-micron gate lithography in an MMIC production environment
title_full Sub-micron gate lithography in an MMIC production environment
title_fullStr Sub-micron gate lithography in an MMIC production environment
title_full_unstemmed Sub-micron gate lithography in an MMIC production environment
title_short Sub-micron gate lithography in an MMIC production environment
title_sort sub micron gate lithography in an mmic production environment
topic Sloan School of Management
Electrical Engineering
url http://hdl.handle.net/1721.1/13600
work_keys_str_mv AT moranpeterwilliam submicrongatelithographyinanmmicproductionenvironment