Unevenly spaced continuous measurement approach for dual rotating–retarder Mueller matrix ellipsometry
© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. In order to efficiently extract the sample Mueller matrix by dual rotating-retarder ellipsometry, it is critical for the data reduction technique to achieve a minimal data processing burden while consideri...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
The Optical Society
2021
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| Online Access: | https://hdl.handle.net/1721.1/136204 |
| _version_ | 1826204480603947008 |
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| author | Meng, Kai Jiang, Bo Samolis, Christos D Alrished, Mohamad Youcef-Toumi, Kamal |
| author2 | Massachusetts Institute of Technology. Department of Mechanical Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Mechanical Engineering Meng, Kai Jiang, Bo Samolis, Christos D Alrished, Mohamad Youcef-Toumi, Kamal |
| author_sort | Meng, Kai |
| collection | MIT |
| description | © 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. In order to efficiently extract the sample Mueller matrix by dual rotating-retarder ellipsometry, it is critical for the data reduction technique to achieve a minimal data processing burden while considering the ease of retarder control. In this paper, we propose an unevenly spaced sampling strategy to reach a globally optimal measurement matrix with minimum sampling points for continuous measurements. Taking into account the robustness to both systematic errors and detection noise, we develop multi-objective optimization models to identify the optimal unevenly spaced sampling points. A combined global search algorithm based on the multi-objective genetic algorithm is subsequently designed to solve our model. Finally, simulations and experiments are conducted to validate our approach as well as to provide near-optimal schemes for different design scenarios. The results demonstrate that significant improvement on error immunity performance can be achieved by applying an unevenly sampled measurement strategy compared to an evenly sampled one for our ellipsometer scenario. |
| first_indexed | 2024-09-23T12:56:16Z |
| format | Article |
| id | mit-1721.1/136204 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T12:56:16Z |
| publishDate | 2021 |
| publisher | The Optical Society |
| record_format | dspace |
| spelling | mit-1721.1/1362042023-11-07T20:19:13Z Unevenly spaced continuous measurement approach for dual rotating–retarder Mueller matrix ellipsometry Meng, Kai Jiang, Bo Samolis, Christos D Alrished, Mohamad Youcef-Toumi, Kamal Massachusetts Institute of Technology. Department of Mechanical Engineering © 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. In order to efficiently extract the sample Mueller matrix by dual rotating-retarder ellipsometry, it is critical for the data reduction technique to achieve a minimal data processing burden while considering the ease of retarder control. In this paper, we propose an unevenly spaced sampling strategy to reach a globally optimal measurement matrix with minimum sampling points for continuous measurements. Taking into account the robustness to both systematic errors and detection noise, we develop multi-objective optimization models to identify the optimal unevenly spaced sampling points. A combined global search algorithm based on the multi-objective genetic algorithm is subsequently designed to solve our model. Finally, simulations and experiments are conducted to validate our approach as well as to provide near-optimal schemes for different design scenarios. The results demonstrate that significant improvement on error immunity performance can be achieved by applying an unevenly sampled measurement strategy compared to an evenly sampled one for our ellipsometer scenario. 2021-10-27T20:34:15Z 2021-10-27T20:34:15Z 2019 2020-08-14T13:55:34Z Article http://purl.org/eprint/type/JournalArticle https://hdl.handle.net/1721.1/136204 en 10.1364/OE.27.014736 Optics Express Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf The Optical Society OSA Publishing |
| spellingShingle | Meng, Kai Jiang, Bo Samolis, Christos D Alrished, Mohamad Youcef-Toumi, Kamal Unevenly spaced continuous measurement approach for dual rotating–retarder Mueller matrix ellipsometry |
| title | Unevenly spaced continuous measurement approach for dual rotating–retarder Mueller matrix ellipsometry |
| title_full | Unevenly spaced continuous measurement approach for dual rotating–retarder Mueller matrix ellipsometry |
| title_fullStr | Unevenly spaced continuous measurement approach for dual rotating–retarder Mueller matrix ellipsometry |
| title_full_unstemmed | Unevenly spaced continuous measurement approach for dual rotating–retarder Mueller matrix ellipsometry |
| title_short | Unevenly spaced continuous measurement approach for dual rotating–retarder Mueller matrix ellipsometry |
| title_sort | unevenly spaced continuous measurement approach for dual rotating retarder mueller matrix ellipsometry |
| url | https://hdl.handle.net/1721.1/136204 |
| work_keys_str_mv | AT mengkai unevenlyspacedcontinuousmeasurementapproachfordualrotatingretardermuellermatrixellipsometry AT jiangbo unevenlyspacedcontinuousmeasurementapproachfordualrotatingretardermuellermatrixellipsometry AT samolischristosd unevenlyspacedcontinuousmeasurementapproachfordualrotatingretardermuellermatrixellipsometry AT alrishedmohamad unevenlyspacedcontinuousmeasurementapproachfordualrotatingretardermuellermatrixellipsometry AT youceftoumikamal unevenlyspacedcontinuousmeasurementapproachfordualrotatingretardermuellermatrixellipsometry |