Unevenly spaced continuous measurement approach for dual rotating–retarder Mueller matrix ellipsometry

Unevenly spaced continuous measurement approach for dual rotating–retarder Mueller matrix ellipsometry

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. In order to efficiently extract the sample Mueller matrix by dual rotating-retarder ellipsometry, it is critical for the data reduction technique to achieve a minimal data processing burden while consideri...

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Bibliographic Details
Main Authors: Meng, Kai, Jiang, Bo, Samolis, Christos D, Alrished, Mohamad, Youcef-Toumi, Kamal
Other Authors: Massachusetts Institute of Technology. Department of Mechanical Engineering
Format: Article
Language:English
Published: The Optical Society 2021
Online Access:https://hdl.handle.net/1721.1/136204

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https://hdl.handle.net/1721.1/136204

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