Mechanism of ion beam induced deposition
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1990.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
| Published: |
Massachusetts Institute of Technology
2005
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/13637 |
| _version_ | 1811092601143558144 |
|---|---|
| author | Dubner, Andrew D. (Andrew David) |
| author2 | Carl V. Thompson and John Melngailis. |
| author_facet | Carl V. Thompson and John Melngailis. Dubner, Andrew D. (Andrew David) |
| author_sort | Dubner, Andrew D. (Andrew David) |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1990. |
| first_indexed | 2024-09-23T15:20:40Z |
| format | Thesis |
| id | mit-1721.1/13637 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T15:20:40Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/136372019-04-10T10:50:24Z Mechanism of ion beam induced deposition Dubner, Andrew D. (Andrew David) Carl V. Thompson and John Melngailis. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering Materials Science and Engineering Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1990. Includes bibliographical references (leaves 174-177). by Andrew D. Dubner. Ph.D. 2005-08-10T22:31:27Z 2005-08-10T22:31:27Z 1990 1990 Thesis http://hdl.handle.net/1721.1/13637 24250290 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 177 leaves 11795196 bytes 11794955 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Materials Science and Engineering Dubner, Andrew D. (Andrew David) Mechanism of ion beam induced deposition |
| title | Mechanism of ion beam induced deposition |
| title_full | Mechanism of ion beam induced deposition |
| title_fullStr | Mechanism of ion beam induced deposition |
| title_full_unstemmed | Mechanism of ion beam induced deposition |
| title_short | Mechanism of ion beam induced deposition |
| title_sort | mechanism of ion beam induced deposition |
| topic | Materials Science and Engineering |
| url | http://hdl.handle.net/1721.1/13637 |
| work_keys_str_mv | AT dubnerandrewdandrewdavid mechanismofionbeaminduceddeposition |