Mechanism of ion beam induced deposition

Mechanism of ion beam induced deposition

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1990.

Bibliographic Details
Main Author: Dubner, Andrew D. (Andrew David)
Other Authors: Carl V. Thompson and John Melngailis.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Materials Science and Engineering
Online Access:http://hdl.handle.net/1721.1/13637

Similar Items

Similar Items