Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact

Bibliographic Details
Main Authors: Laine, Hannu S., Vahlman, Henri, Haarahiltunen, Antti, Jensen, Mallory A., Modanese, Chiara, Wagner, Matthias, Wolny, Franziska, Buonassisi, Tonio, Savin, Hele
Format: Article
Language:English
Published: Author(s) 2021
Online Access:https://hdl.handle.net/1721.1/136720
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author Laine, Hannu S.
Vahlman, Henri
Haarahiltunen, Antti
Jensen, Mallory A.
Modanese, Chiara
Wagner, Matthias
Wolny, Franziska
Buonassisi, Tonio
Savin, Hele
author_facet Laine, Hannu S.
Vahlman, Henri
Haarahiltunen, Antti
Jensen, Mallory A.
Modanese, Chiara
Wagner, Matthias
Wolny, Franziska
Buonassisi, Tonio
Savin, Hele
author_sort Laine, Hannu S.
collection MIT
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institution Massachusetts Institute of Technology
language English
last_indexed 2024-09-23T14:51:32Z
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spelling mit-1721.1/1367202021-10-29T03:12:16Z Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact Laine, Hannu S. Vahlman, Henri Haarahiltunen, Antti Jensen, Mallory A. Modanese, Chiara Wagner, Matthias Wolny, Franziska Buonassisi, Tonio Savin, Hele 2021-10-28T17:46:33Z 2021-10-28T17:46:33Z 2018 2020-06-24T18:30:47Z Article http://purl.org/eprint/type/ConferencePaper https://hdl.handle.net/1721.1/136720 Laine, Hannu S., Vahlman, Henri, Haarahiltunen, Antti, Jensen, Mallory A., Modanese, Chiara et al. 2018. "Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact." 1999. en 10.1063/1.5049255 Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Author(s) Other repository
spellingShingle Laine, Hannu S.
Vahlman, Henri
Haarahiltunen, Antti
Jensen, Mallory A.
Modanese, Chiara
Wagner, Matthias
Wolny, Franziska
Buonassisi, Tonio
Savin, Hele
Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact
title Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact
title_full Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact
title_fullStr Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact
title_full_unstemmed Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact
title_short Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact
title_sort vertically integrated modeling of light induced defects process modeling degradation kinetics and device impact
url https://hdl.handle.net/1721.1/136720
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