Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
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2021
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Online Access: | https://hdl.handle.net/1721.1/136720 |
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author | Laine, Hannu S. Vahlman, Henri Haarahiltunen, Antti Jensen, Mallory A. Modanese, Chiara Wagner, Matthias Wolny, Franziska Buonassisi, Tonio Savin, Hele |
author_facet | Laine, Hannu S. Vahlman, Henri Haarahiltunen, Antti Jensen, Mallory A. Modanese, Chiara Wagner, Matthias Wolny, Franziska Buonassisi, Tonio Savin, Hele |
author_sort | Laine, Hannu S. |
collection | MIT |
first_indexed | 2024-09-23T14:51:32Z |
format | Article |
id | mit-1721.1/136720 |
institution | Massachusetts Institute of Technology |
language | English |
last_indexed | 2024-09-23T14:51:32Z |
publishDate | 2021 |
publisher | Author(s) |
record_format | dspace |
spelling | mit-1721.1/1367202021-10-29T03:12:16Z Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact Laine, Hannu S. Vahlman, Henri Haarahiltunen, Antti Jensen, Mallory A. Modanese, Chiara Wagner, Matthias Wolny, Franziska Buonassisi, Tonio Savin, Hele 2021-10-28T17:46:33Z 2021-10-28T17:46:33Z 2018 2020-06-24T18:30:47Z Article http://purl.org/eprint/type/ConferencePaper https://hdl.handle.net/1721.1/136720 Laine, Hannu S., Vahlman, Henri, Haarahiltunen, Antti, Jensen, Mallory A., Modanese, Chiara et al. 2018. "Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact." 1999. en 10.1063/1.5049255 Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Author(s) Other repository |
spellingShingle | Laine, Hannu S. Vahlman, Henri Haarahiltunen, Antti Jensen, Mallory A. Modanese, Chiara Wagner, Matthias Wolny, Franziska Buonassisi, Tonio Savin, Hele Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact |
title | Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact |
title_full | Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact |
title_fullStr | Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact |
title_full_unstemmed | Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact |
title_short | Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact |
title_sort | vertically integrated modeling of light induced defects process modeling degradation kinetics and device impact |
url | https://hdl.handle.net/1721.1/136720 |
work_keys_str_mv | AT lainehannus verticallyintegratedmodelingoflightinduceddefectsprocessmodelingdegradationkineticsanddeviceimpact AT vahlmanhenri verticallyintegratedmodelingoflightinduceddefectsprocessmodelingdegradationkineticsanddeviceimpact AT haarahiltunenantti verticallyintegratedmodelingoflightinduceddefectsprocessmodelingdegradationkineticsanddeviceimpact AT jensenmallorya verticallyintegratedmodelingoflightinduceddefectsprocessmodelingdegradationkineticsanddeviceimpact AT modanesechiara verticallyintegratedmodelingoflightinduceddefectsprocessmodelingdegradationkineticsanddeviceimpact AT wagnermatthias verticallyintegratedmodelingoflightinduceddefectsprocessmodelingdegradationkineticsanddeviceimpact AT wolnyfranziska verticallyintegratedmodelingoflightinduceddefectsprocessmodelingdegradationkineticsanddeviceimpact AT buonassisitonio verticallyintegratedmodelingoflightinduceddefectsprocessmodelingdegradationkineticsanddeviceimpact AT savinhele verticallyintegratedmodelingoflightinduceddefectsprocessmodelingdegradationkineticsanddeviceimpact |