| Summary: | The high temperature sensitivity of silicon material limits the applications of silicon-based micro-ring resonators in integrated photonics. To realize a low but broadband temperature-dependence-wavelength-shift (TDWS) micro-ring resonator, designing a broadband athermal waveguide becomes a significant task. In this work, we propose a broadband athermal waveguide which shows a low effective thermos-optical coefficient (TOC) of ±1×10-6/K at 1400 nm to 1700 nm. The proposed waveguide shows low-loss performance of 0.01 dB/cm and stable broadband-athermal ability when it's applied in micro-ring resonators, and the optical loss of micro-ring resonator with a radius of 100 μm using this waveguide is 0.02 dB/cm.
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