Electromechanically reconfigurable optical nano-kirigami

© 2021, The Author(s). Kirigami, with facile and automated fashion of three-dimensional (3D) transformations, offers an unconventional approach for realizing cutting-edge optical nano-electromechanical systems. Here, we demonstrate an on-chip and electromechanically reconfigurable nano-kirigami with...

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Main Authors: Chen, Shanshan, Liu, Zhiguang, Du, Huifeng, Tang, Chengchun, Ji, Chang-Yin, Quan, Baogang, Pan, Ruhao, Yang, Lechen, Li, Xinhao, Gu, Changzhi, Zhang, Xiangdong, Yao, Yugui, Li, Junjie, Fang, Nicholas X, Li, Jiafang
Other Authors: Massachusetts Institute of Technology. Department of Mechanical Engineering
Format: Article
Language:English
Published: Springer Science and Business Media LLC 2021
Online Access:https://hdl.handle.net/1721.1/138724
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author Chen, Shanshan
Liu, Zhiguang
Du, Huifeng
Tang, Chengchun
Ji, Chang-Yin
Quan, Baogang
Pan, Ruhao
Yang, Lechen
Li, Xinhao
Gu, Changzhi
Zhang, Xiangdong
Yao, Yugui
Li, Junjie
Fang, Nicholas X
Li, Jiafang
author2 Massachusetts Institute of Technology. Department of Mechanical Engineering
author_facet Massachusetts Institute of Technology. Department of Mechanical Engineering
Chen, Shanshan
Liu, Zhiguang
Du, Huifeng
Tang, Chengchun
Ji, Chang-Yin
Quan, Baogang
Pan, Ruhao
Yang, Lechen
Li, Xinhao
Gu, Changzhi
Zhang, Xiangdong
Yao, Yugui
Li, Junjie
Fang, Nicholas X
Li, Jiafang
author_sort Chen, Shanshan
collection MIT
description © 2021, The Author(s). Kirigami, with facile and automated fashion of three-dimensional (3D) transformations, offers an unconventional approach for realizing cutting-edge optical nano-electromechanical systems. Here, we demonstrate an on-chip and electromechanically reconfigurable nano-kirigami with optical functionalities. The nano-electromechanical system is built on an Au/SiO2/Si substrate and operated via attractive electrostatic forces between the top gold nanostructure and bottom silicon substrate. Large-range nano-kirigami like 3D deformations are clearly observed and reversibly engineered, with scalable pitch size down to 0.975 μm. Broadband nonresonant and narrowband resonant optical reconfigurations are achieved at visible and near-infrared wavelengths, respectively, with a high modulation contrast up to 494%. On-chip modulation of optical helicity is further demonstrated in submicron nano-kirigami at near-infrared wavelengths. Such small-size and high-contrast reconfigurable optical nano-kirigami provides advanced methodologies and platforms for versatile on-chip manipulation of light at nanoscale.
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spelling mit-1721.1/1387242023-03-30T20:43:33Z Electromechanically reconfigurable optical nano-kirigami Chen, Shanshan Liu, Zhiguang Du, Huifeng Tang, Chengchun Ji, Chang-Yin Quan, Baogang Pan, Ruhao Yang, Lechen Li, Xinhao Gu, Changzhi Zhang, Xiangdong Yao, Yugui Li, Junjie Fang, Nicholas X Li, Jiafang Massachusetts Institute of Technology. Department of Mechanical Engineering © 2021, The Author(s). Kirigami, with facile and automated fashion of three-dimensional (3D) transformations, offers an unconventional approach for realizing cutting-edge optical nano-electromechanical systems. Here, we demonstrate an on-chip and electromechanically reconfigurable nano-kirigami with optical functionalities. The nano-electromechanical system is built on an Au/SiO2/Si substrate and operated via attractive electrostatic forces between the top gold nanostructure and bottom silicon substrate. Large-range nano-kirigami like 3D deformations are clearly observed and reversibly engineered, with scalable pitch size down to 0.975 μm. Broadband nonresonant and narrowband resonant optical reconfigurations are achieved at visible and near-infrared wavelengths, respectively, with a high modulation contrast up to 494%. On-chip modulation of optical helicity is further demonstrated in submicron nano-kirigami at near-infrared wavelengths. Such small-size and high-contrast reconfigurable optical nano-kirigami provides advanced methodologies and platforms for versatile on-chip manipulation of light at nanoscale. 2021-12-17T19:42:44Z 2021-12-17T19:42:44Z 2021 2021-12-17T19:39:39Z Article http://purl.org/eprint/type/JournalArticle https://hdl.handle.net/1721.1/138724 Chen, Shanshan, Liu, Zhiguang, Du, Huifeng, Tang, Chengchun, Ji, Chang-Yin et al. 2021. "Electromechanically reconfigurable optical nano-kirigami." Nature Communications, 12 (1). en 10.1038/S41467-021-21565-X Nature Communications Creative Commons Attribution 4.0 International license https://creativecommons.org/licenses/by/4.0/ application/pdf Springer Science and Business Media LLC Nature
spellingShingle Chen, Shanshan
Liu, Zhiguang
Du, Huifeng
Tang, Chengchun
Ji, Chang-Yin
Quan, Baogang
Pan, Ruhao
Yang, Lechen
Li, Xinhao
Gu, Changzhi
Zhang, Xiangdong
Yao, Yugui
Li, Junjie
Fang, Nicholas X
Li, Jiafang
Electromechanically reconfigurable optical nano-kirigami
title Electromechanically reconfigurable optical nano-kirigami
title_full Electromechanically reconfigurable optical nano-kirigami
title_fullStr Electromechanically reconfigurable optical nano-kirigami
title_full_unstemmed Electromechanically reconfigurable optical nano-kirigami
title_short Electromechanically reconfigurable optical nano-kirigami
title_sort electromechanically reconfigurable optical nano kirigami
url https://hdl.handle.net/1721.1/138724
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